Advanced experimental applications for x-ray transmission gratings Spectroscopy using a novel grating fabrication method

摘要

A novel fabrication method for soft x-ray transmission grating and otheroptical elements is presented. The method uses Focused-Ion-Beam (FIB)technology to fabricate high-quality free standing grating bars on TransmissionElectron Microscopy grids (TEM-grid). High quality transmission gratings areobtained with superb accuracy and versatility. Using these gratings andback-illuminated CCD camera, absolutely calibrated x-ray spectra can beacquired for soft x-ray source diagnostics in the 100-3000 eV spectral range.Double grating combinations of identical or different parameters are easilyfabricated, allowing advanced one-shot application of transmission gratingspectroscopy. These applications include spectroscopy with different spectralresolutions, bandwidths, dynamic ranges, and may serve for identification ofhigh-order contribution, and spectral calibrations of various x-ray opticalelements.